2016年5月4日星期三

Uneven coating processing vacuum coating machine

         
  Vacuum coating machine handling different processes differ, casual glitches are likely to affect the normal operation of the whole machine equipment, encountered problems to one investigation, with experienced instructors can often solve many problems. Speaking of the uniformity of the coating, which is one of the standard assessment of a vacuum coating machine is good or bad.
  Machine coating process, handle uneven coating vacuum coating machine, you need to troubleshoot the film may affect the uniformity of the problem, before the mass detection repaired. All film coating machine coating system will be affected to some extent in the case of film uniformity, take magnetron sputtering vacuum coating machine for a brief example:
  Magnetron sputtering of work is not as complicated, with a highly efficient and stable by sputtering source bombarded targets in a certain vacuum coating indoor environmental conditions, so it is a PVD target physical decomposition process, the target decomposed atoms form a film deposition surface of the product through the process. During the reaction, consider packing a magnetic field uniformity, vacuum environment, the protection of gas three aspects affect film uniformity. However, some changes in the uneven film may also be unstable or is caused by target sputtering source, this type of situation is more difficult to handle.
  You know, no matter Monitor precision coating machine comes with high or low, it is only able to control the position of a single point of interior coating layer thickness, generally refers to the middle position of products, even to this point by controlling the film away from this point to ensure product film uniformity.
  Vacuum environment is controlled by suction, the time required to maintain a stable degree of vacuum accurate detection and control systems, need to stop pumping when the degree of vacuum reaches a desired state, the degree of vacuum state is required to be lower than the need for timely evacuation regulation. There is a reasonable degree of vacuum coating interval range that the retardation decreased as the greater the required accuracy, the more difficult to control, better and more stable relative to the regulator; interval accuracy the greater the difference, the lower range, for detection and control system requirements low relative pressure greater volatility, the greater the impact for the film uniformity.
  In the past few years, more and more customers have increasingly high demands on the machine's requirements, especially the quality of the film density and uniformity, etc., for the production of coating machine manufacturers, to improve their technology is competitive protection force.

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