Vacuum coating machine maintenance and maintenance of the equipment maintenance

Vacuum coating machine maintenance and maintenance of the equipment maintenance

(1) the vacuum coating machine gauge, electric contact pressure gauge, the place such as thermocouple is often coated with oil diffusion pump, to that of the bridge between the formation of a layer of oil film, prevent leakage. The above parts and flange
It is not allowed to use vacuum cement seal for a long time.
(2) the vacuum coating equipment the use of the environment, the relative humidity below 85%, the temperature at 10 ~ 40 ℃. When repairing equipment, parts are not allowed to use the hammer knock, seal face, sealing groove is not allowed to scratch.
(3) the vacuum coating equipment, observe the display in the instrument, and the voice of the pump, in order to found abnormal in time, find out the problem.
(4) the bolt regular inspection of each part, if found loose, tighten in a timely manner.
(5) the vacuum coating machine at work, the operator shall not leave for a long time.
(6) operators must be familiar with all kinds of instruments, pumps, all the parts of the equipment. Read and understand all kinds of specifications.
Every batch (7), before starting the check protect gas cylinder capacity, in order to avoid insufficient gas filling, change of gas cylinders.
(8) mechanical pump, roots pump should be regular gas in oil, oil cup of roots pump to keep oil has always been. When an oil change must put the oil clean.
(9) diffusion pump oil change vacuum coating equipment, internal oxidation, if any, of the diffusion pump internal oxidation layer handles clean, then put on the new oil.
(10) cooling water pressure should be kept between 0.1 to 0.2 Mpa, the water temperature is 45 ℃ or less.
(11) compressed air pressure is between 0.4 ~ 0.5 Mpa.
(12) vacuum coating equipment after startup if any abnormal situation, should immediately ruled out or stop to find the reasons.
(13) regularly check back into the water, the various parts of work should guarantee each part there is plenty of water.
(14) to stop using vacuum coating equipment, furnace gas should be fit, long time no, filling the protective gas, and put the equipment in the water jacket of circulating water.
(15) does not allow for vacuum coating equipment used flammable and corrosive gases as a protective atmosphere.
(16) three even pieces of the pneumatic system of oil-water separator is often water, oil mist device should be injected into the vacuum oil diffusion pump.
(17) to ensure that the equipment of the whole machine voltage in the range of 350 ~ 420 V. Three phase equilibrium.
(18) filling the protective gas, the purity should be not less than 99.99%.
(19) surface vacuum coating equipment and instrumentation to maintain clean surface, wipe with water and furnace wall are not allowed to have with the vacuum type oil rag to wipe.