The vacuum chamber vacuum coating equipment how to design

The vacuum chamber vacuum coating equipment how to design

The vacuum chamber vacuum coating equipment how to design? Vacuum coating technology is the use of physical or chemical methods under vacuum conditions, so that the membrane surface to obtain the required vacuum coating technology which uses a method according to the different sections is divided into evaporation deposition, sputtering, ion plating, molecular beam deposition, and beam epitaxy, coating equipment is used in this analysis magnetron sputtering.
The vacuum chamber is a principal part of the vacuum apparatus, the vacuum chamber is the design of the main sealing and reliability considerations, the structure must be reasonable, the material production of vacuum equipment is carried out in a vacuum chamber, the vacuum degree of the influence of the material to be small, design can not be sloppy, pay attention to some problems.
Using magnetron sputtering vacuum coating equipment is commonly used in the main structure of the cylinder, the structure to ensure rapid evacuation, because airbags will deflate slowly, so to avoid isolated pockets, the upper end of the vacuum system will be installed magnetron sputtering a gun, the vacuum chamber and components in order to have sufficient strength to ensure that no change in the external shape and internal forces, the thickness needs to be sufficient.
Welding is a vacuum chamber in the manufacture of an important process to ensure that the vacuum chamber after welding does not produce leakage phenomenon, to be rational design of welded structures, improve the welding quality, ultra-high vacuum in the inner wall of the roughness of the surface to be polished to make it outdoors indoors smooth, special attention is required to prevent rust.
Leading coating decade specializing in a variety of vacuum coating application equipment manufacturers, over the years committed to the development and production of vacuum coating machine, with the latest technology to create a vacuum plating continue to meet market needs equipment, providing customers with customized process solutions and machines. Customers are welcome to inquire.

Physical Vapor Deposition Coating Techniques

The main vacuum coaitng method :PVD (Vacuum evaporation). Sputtering (Vacuum sputtering), ion plating .

1. Vacuum deposition

Vacuum deposition is plating material is heated in a vacuum, evaporation, so that evaporation of the atom or atomic group at a lower temperature of the substrate, thereby forming a film. When the kettle to boil water to make steam out of the windows covered with a layer of water vapor similar to blur. It is the use of resistance heating, high frequency induction heating or high energy beam (electron beam, laser beam, ion beam) bombardment coating material into vapor, and the deposition surface of the substrate to a mature technology.

Resistance heating means inexpensive, simple, widely used for Au, Ag, Cu, Ni, Cr and other semiconductor materials and the resistive material deposition, except for special materials, almost can meet the requirements of the coating. Electron-beam evaporation method is used for the production of the semiconductor industry, as demanding as the purity of the insulator film and the evaporation, Al deposition of high-speed, high-melting material deposition and the like.

2. Sputtering

Sputtering is a phenomenon of film formation by sputtering method. Sputtering phenomenon like throwing an iron ball on the gravel, gravel will be Zhuangfei out that. Sputtering under an argon gas is filled in the vacuum conditions, the glow discharge technique, argon gas was ionized argon ion (Ar +), argon ion under the action of the electric force acceleration bombardment cathode, the cathode materials (coating materials ) are sputtered down, deposited onto the surface coating method of forming. Sputtered film is divided into DC sputtering, RF magnetron s​puttering and sputtering.

Recent studies have focused on the sputtering in the sputtering film formation rate increase, reducing the sputtering gas pressure and a controlled ion beam sputtering and so on.

Cheap shot coating method in many areas of production of integrated circuits, various types of flat panel displays, electronic components production and optical, watch industry, etc., are rapid promotion and universal application, it has become the core technology of thin films.

3. Ion plating

Ion plating is under vacuum, using a variety of gas-discharge technology evaporated atoms are partially ionized into a plasma, and produce large amounts of high neutral particle, coating deposited on the workpiece surface is formed. Ion plating and vacuum deposition; sputtering fundamental difference in the first two coating over substrate during potentials are zero, and in the ion plating process, the need to add certain amplitude negative bias on the substrate, although the ion plating method than vacuum evaporation and sputtering

Uses a variety of vacuum coating machine case

             

1. vacuum coating machine in use on decorations
Daily decorations very much, whether it is with the hands, wearing, put the house, the car hanging, eyes to see, packaging, in short, is to decorate beautiful, and many products need to achieve a particular look effect undoubtedly surface treatment, using vacuum coating machine for surface coating to change the appearance inevitable.

2. The vacuum coating machine in use on glass
Glass is the most touching thing. Whether it is used in everyday life mirrors, glass building on the inside and outside houses, car mirrors, mobile phone screen glass. Ordinary glass fragile performance is not high, although the film can not change the glass material itself and performance, but can make the glass have special effects, such as we use a mirror can be used in vacuum coating machine silver plating on a surface made of glass the film to make it crystal clear reflection.

3. vacuum coating machine in terms of the use of solar energy
Solar film coating system is now very popular in general, because the solar absorption of sunlight to store energy demanding, collecting solar energy for the wavelength spectrum have certain requirements to be valid to consider the use of solar thermal energy absorbing surface wavelengths, using vacuum coating machine this film can be plated system.

4. Vacuum Coaters use in optical products
Optical products, many of which are required reflection, AR, absorption and other characteristics, such as binoculars, cameras and other products requiring high light transmission and absorption capacity, everything is a combination of a variety of substances, different combinations may be generated different results, can not be separated in the optical coating technology products, applications, often need to use the vacuum coating machine.

5. vacuum coating machine in integrated circuits, sensors, tooling and other products use
Motherboard very familiar with it, the board production process, surface treatment, the particular film coating system is a must. One of the core values of IC technology vacuum coating technology; in semiconductors, using the case of a lot of films; the tool, in the mold, the appliance coating process hard coating is very common.