Vacuum steaming aluminum plating coating
On the preparation of pure metal coating, mostly by vacuum evaporation plating method. And pure metal aluminum coating, due to its wide range of USES, such as aluminum mirrors in the industry to generations of silver, aluminum etching in integrated circuit conductor; The acid film surface plating of aluminum capacitor; Dacron polyester thin film coated with aluminum production, prevent the ultraviolet irra...diation of food flexible packaging; After dacron polyester film plating cobalt plating of aluminum tape, etc. Therefore, this year to vacuum aluminum plating industry has developed rapidly, not only at home and abroad and are moving in sputtering, ion plating coating technology development.Vacuum steaming aluminum plating film can choose intermittent evaporation coating, also can choose semicontinuous vacuum coating machine. Its source of evaporation source for resistance, electron beam source, also can choose induction heating evaporation source, can according to the specific requirements of the coating material evaporate.
The vacuum evaporation plating aluminum coating process parameters, mainly includes the evaporation chamber pressure, deposition rate, substrate temperature, steam, etc. If from the consideration on the uniformity of substrate distribution of diaphragm, should also pay attention to the relative position of evaporation source to the substrate and the workpiece frame motion state and other factors. Selects the electron beam evaporation source, for example, aluminum coating preparation, its typical main process parameters can be chosen: coating chamber pressure is 2.6 X10-4 pa, evaporation rate is 2 ~ 2.5 nm/s, substrate temperature 20 ℃, evaporate from the 450 nm, electron beam gun voltage of 9 kv, current 0.2 A.