The resistance of the evaporation for evaporation coating machine

The resistance of the evaporation for evaporation coating machine

Evaporation coating machine of evaporation system mainly refers to the film forming device, a lot of film forming device coating machine, resistance heating, electron gun evaporation, magnetron sputtering, rf sputtering, ion plating, such as a variety of ways, I resistance heating and gun evaporation introduce two kinds of way, because the two ways I used more. Evaporation vacuum coating machine of resistance according to its structure and working principle of the application is by far the most, the most extensive way of evaporation, evaporation is also used for the longest way.
The way it works is that the tungsten as a ship, and then installed in the middle of the two electrodes, in the middle of the tungsten boat with herbs, again slowly to the electrode current, current through the tungsten, tungsten boat electric heating, the low voltage, high current make tungsten boat to generate heat, high melting point and heat transfer to the coating material, when the quantity of heat of tungsten boat is higher than the melting point of coating material, material sublimation or vaporization, this method because of easy operation, simple structure, low cost, so is a lot of equipment used, but the evaporation of thin film because of the low density, plus a lot of material can't use this way to evaporation, so it has certain limitations. Tungsten boat evaporation coating materials, the melting point of materials must be less than the melting point of tungsten boat, or there will be no way.