2016年9月5日星期一

Vacuum coating machine for vacuum coating equipment thickness uniformity depends on

Vacuum coating machine for vacuum coating equipment thickness uniformity depends on:
1. The substrate material and the lattice matching degree of target material
2, the substrate surface temperature
3. The evaporation power, rate
Vacuum degree of 4.
5. Coating time, thickness size.
Composition uniformity: evaporation coating composition is not very easy to ensure uniformity, specific can control the above factors, but due to the limitation of principle, for not a single component coating of evaporation coating composition uniformity is not good.
Crystal to uniformity: 1. The lattice matching degree 2. 3 substrate temperature. The evaporation rate

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