1, vacuum coating equipment of each completed more than 200 coating procedures, should be a clean the studio. Method is: use caustic soda (NaOH) saturated solution swab repeatedly vacuum chamber wall, (pay attention to the human body skin can not direct contact with caustic soda solution, so as not to burn) purpose is to make up the membrane material plating aluminum (AL) react with NaOH, reaction membrane after layer falls off, and release the hydrogen. Reoccupy clear water clean vacuum chamber and a cloth stained with gasoline cleaning dirt in the valve.
2, when coarse suction pump (valve pumps, rotary vane pump) continuous work a month (half) the rainy season, need to change the new oil. Method is: screw bolt open oil, put away the old oil, then pump start-up for a few seconds, make the old oil inside the pump completely discharged. Screw bolt playback oil, add new oil to the forehead quantitative endoscopic observation (oil). Use more than six months in a row, oil change oil cover should be opened, a cloth to wipe clean the dirt in the cabinet.
Above 3 6 months of continuous use, diffusion pump, pumping speed significantly slower, or improper operation, filling the air and down link pipes, electric plate, will be squeezed out of the primary nozzle, use gasoline pump cavity and pump bravery to clean first, clean with detergent water again, and then clean with clear water thoroughly clean, moisture volatilizes dry after installed pump, add new oil diffusion pump, and put back into the body, connected pipes, installed electric stove disk, can restart. Before restarting, attention should be paid to leak detection work. Method is: start the pump, close the door, a few minutes, observe whether diffusion pump part of the vacuum degree is 6 x10 palmer, otherwise for leak detection. Check whether the connection place o-ring seal, or crush seal ring. Eliminate leakage hidden trouble is heating, or diffusion pump oil will burn ring, unable to enter the working state.
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